plasma bombardment study 等离子体轰击
In addition, the plasma bombardment induces the charge traps into the near-surface, which make the trapped charge stored stably.
另外,等离子体轰击在薄膜的近表面引入了电荷陷阱,使俘获的驻极化电荷能较稳定地保存。
By field experiments, the technique of infiltration of titanium, nitrogen and carbon by plasma bombardment has proved effective in treatment of some wearing parts in soda manufacturing equipment.
采用等离子轰击扩渗钛、氮、碳技术处理制碱工业设备中的一些易损件,经现场实验,初见成效。
At the same time, the influence of plasma charging and ion bombardment on the quality of silicon oxide are analyzed.
我们同时对反应离子刻蚀工艺中的等离子体充电效应和离子轰击对氧化硅造成的损伤进行了讨论。
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